WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously …

Lithographic apparatus and device manufacturing method

WebA lithographic apparatus is a machine that applies a desired pattern onto a target portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of … Web9 jul. 2009 · Abstract. A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes … birchwood gym classes

Lithographic apparatus and device manufacturing method

WebTo provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on … WebLithography method and lithography apparatus 申请号：JP2024566192 申请日：20151210 公开号：JP6792572B6 公开日：20241223 摘要：A method includes exposing number of fields on a substrate, obtaining data about a field and correcting exposure of the field in subsequent exposures. Web2 sep. 2024 · G03F7/00 — Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; G03F7/0002 — Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping birchwood gym